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X-ray microdiffraction: Local stress distribution in polycrystalline and epitaxial thin films

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http://pubman.mpdl.mpg.de/cone/persons/resource/persons75947

Phillips,  M. A.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons76138

Spolenak,  R.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75228

Arzt,  E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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Citation

Phillips, M. A., Spolenak, R., Tamura, N., Brown, W. L., MacDowell, A. A., Celestre, R. C., et al. (2004). X-ray microdiffraction: Local stress distribution in polycrystalline and epitaxial thin films. Microelectronic Engineering, 75, 117-126.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-2976-4
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