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Size effect on crack formation in Cu/Ta and Ta/Cu/Ta thin film systems

MPS-Authors
http://pubman.mpdl.mpg.de/cone/persons/resource/persons75533

Gruber,  P.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75305

Böhm,  J.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons76263

Wanner,  A.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons76034

Sauter,  L.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons76138

Spolenak,  R.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75228

Arzt,  E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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Citation

Gruber, P., Böhm, J., Wanner, A., Sauter, L., Spolenak, R., & Arzt, E. (2004). Size effect on crack formation in Cu/Ta and Ta/Cu/Ta thin film systems. In P. Anderson, T. Foecke, A. Misra, & R. Rudd (Eds.), Nanoscale Materials and Modeling-Relations Among Processing, Microstructure and Mechanical Properties (pp. P.2.7.1-P.2.7.7). Boston: Materials Research Society.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-2912-2
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