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Conference Paper

Hillock formation and thermal stresses in thin Au films on Si substrates

MPS-Authors
http://pubman.mpdl.mpg.de/cone/persons/resource/persons76034

Sauter,  L.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75245

Balk,  T. J.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75388

Dehm,  G.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75903

Nucci,  J. A.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

http://pubman.mpdl.mpg.de/cone/persons/resource/persons75228

Arzt,  E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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Citation

Sauter, L., Balk, T. J., Dehm, G., Nucci, J. A., & Arzt, E. (2005). Hillock formation and thermal stresses in thin Au films on Si substrates. In T. Buchheit, A. M. Minor, R. Spolenak, & K. Takashima (Eds.), Thin Films—Stresses and Mechanical Properties XI (pp. O5.2.2-O5.2.6). Warrendale, Pa.: Materials Research Society.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-286A-8
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