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Characterization of nanolayers by sputter depth profiling

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Hofmann,  S.
Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S. (2005). Characterization of nanolayers by sputter depth profiling. Applied Surface Science, 241, 113-121.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-2744-2
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