Room temperature silicon wafer bonding with ultra-thin polymer films

Kräuter, G.; Schumacher, A.; Gösele, U.; Jaworek, T.; Wegner, Gerhard

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Room temperature silicon wafer bonding with ultra-thin polymer films

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Jaworek, T.
MPI for Polymer Research, Max Planck Society;

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Wegner, Gerhard
MPI for Polymer Research, Max Planck Society;

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Kräuter, G., Schumacher, A., Gösele, U., Jaworek, T., & Wegner, G. (1997). Room temperature silicon wafer bonding with ultra-thin polymer films. Advanced Materials, 9(5), 417-420.

Cite as: https://hdl.handle.net/11858/00-001M-0000-000F-58D2-D

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