Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39 nm 
structures

Mayer, M.; Grévent, C.; Szeghalmi, A.; Knez, M.; Weigand, M.; Rehbein, S.; Schneider, G.; Baretzky, B.; Schütz, G.

doi:10.1016/j.ultramic.2011.09.003

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Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39 nm structures

Mayer, M., Grévent, C., Szeghalmi, A., Knez, M., Weigand, M., Rehbein, S., et al. (2011). Multilayer Fresnel zone plate for soft X-ray microscopy resolves sub-39 nm structures. Ultramicroscopy, 111, 1706-1711. doi:10.1016/j.ultramic.2011.09.003.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-4E35-1 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-4E36-0

Genre: Journal Article

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Creators:
Mayer, M.¹, Author
Grévent, C.¹, Author
Szeghalmi, A.², Author
Knez, M.², Author
Weigand, M.¹, Author
Rehbein, S.³, Author
Schneider, G.³, Author
Baretzky, B.^{1, 4}, Author
Schütz, G.¹, Author

Affiliations:
1Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497648
2Max Planck Society, ou_persistent13
3Helmholtz-Zentrum Berlin für Materialien und Energie, BESSY II, Albert-Einstein-Str. 15, 12489 Berlin, Germany; Karlsruhe Institute of Technology, Hermann-von Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany;, ou_persistent22
4Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644

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Free keywords: MPI für Intelligente Systeme; MPI für Mikrostrukturphysik; Abt. Schütz;

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Language(s): eng - English

Dates: Date issued: 2011

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 573867
DOI: 10.1016/j.ultramic.2011.09.003

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Title: Ultramicroscopy

Source Genre: Journal

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Pages: - Volume / Issue: 111 Sequence Number: - Start / End Page: 1706 - 1711 Identifier: -