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  Polarization and phase shifting interferometry

Rothau, S., Manthel, K., & Lindlein, N. (2017). Polarization and phase shifting interferometry. In OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION X. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA: SPIE-INT SOC OPTICAL ENGINEERING. doi:10.1117/12.2269720.

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Genre: Conference Paper

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 Creators:
Rothau, Sergej1, Author           
Manthel, Klaus2, Author
Lindlein, Norbert1, Author           
Affiliations:
1Optical Design and Microoptics, Leuchs Division, Max Planck Institute for the Science of Light, Max Planck Society, ou_2364704              
2external, ou_persistent22              

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Free keywords: Instruments & Instrumentation; Optics; polarimetry; phase shifting interferometry; retardation measurement;
 Abstract: This publication presents a novel interferometric method for the simultaneous measurement of the phase and state of polarization of a light wave with arbitrary, in particular locally varying elliptical polarization. The measurement strategy is based on variations of the reference wave concerning phase and polarization and processing the interference patterns so obtained. With this method, that is very similar to the classical phase shifting interferometry, a complete analysis of spatially variant states of polarization and their phase fronts can be done in one measurement cycle. Furthermore, a direct analysis of specimens under test regarding birefringence and the impact on the phase of the incoming light can be realized. The theoretical description of the investigated methods and their experimental implementation are presented.

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Language(s): eng - English
 Dates: 2017
 Publication Status: Published online
 Pages: 7
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: ISI: 000407289600001
DOI: 10.1117/12.2269720
 Degree: -

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Title: Conference on Optical Measurement Systems for Industrial Inspection X part of the SPIE Optical Metrology Symposium
Place of Event: Munich, GERMANY
Start-/End Date: 2017-06-26 - 2017-06-29

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Title: OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION X
Source Genre: Proceedings
 Creator(s):
Affiliations:
Publ. Info: 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA : SPIE-INT SOC OPTICAL ENGINEERING
Pages: - Volume / Issue: - Sequence Number: UNSP 1032903 Start / End Page: - Identifier: ISSN: 0277-786X
ISBN: 978-1-5106-1104-7; 978-1-5106-1103-0

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Title: Proceedings of SPIE
Source Genre: Series
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Publ. Info: -
Pages: - Volume / Issue: 10329 Sequence Number: - Start / End Page: - Identifier: ISSN: 0277-786X