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  Controlling FIB-SBEM slice thickness by monitoring the transmitted ion beam

Boergens, K. M., & Denk, W. (2013). Controlling FIB-SBEM slice thickness by monitoring the transmitted ion beam. JOURNAL OF MICROSCOPY, 252(3), 258-262. doi:10.1111/jmi.12086.

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 Creators:
Boergens, K. M.1, Author           
Denk, Winfried2, Author           
Affiliations:
1Research Group: Structure of Neocortical Circuits / Helmstaedter, MPI of Neurobiology, Max Planck Society, ou_1128547              
2Department of Biomedical Optics, Max Planck Institute for Medical Research, Max Planck Society, ou_1497699              

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Free keywords: VOLUME ELECTRON-MICROSCOPY; CIRCUIT RECONSTRUCTIONBeam position control; FIB-SBEM; FIB-SEM; focused ion beam; slice thickness;
 Abstract: Serial block-face electron microscopy with focused ion beam cutting suffers from cutting artefacts caused by changes in the relative position of beam and sample, which are, for example, inevitable when reconditioning the ion gun. The latter has to be done periodically, which limits the continuous stack-acquisition time to several days. Here, we describe a method for controlling the ion-beam position that is based on detecting that part of the ion beam that passes the sample (transmitted beam). We find that the transmitted-beam current decreases monotonically as the beam approaches the sample and can be used to determine the relative position of beam and sample to an accuracy of around one nanometre. By controlling the beam approach using this current as the feedback parameter, it is possible to ion-mill consecutive 5 nm slices without detectable variations in thickness even in the presence of substantial temperature fluctuations and to restart the acquisition of a stack seamlessly. In addition, the use of a silicon junction detector instead of the in-column detector is explored.

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Language(s): eng - English
 Dates: 2013-12
 Publication Status: Issued
 Pages: 5
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: ISI: 000326969900006
DOI: 10.1111/jmi.12086
 Degree: -

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Title: JOURNAL OF MICROSCOPY
Source Genre: Journal
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Publ. Info: 111 RIVER ST, HOBOKEN 07030-5774, NJ USA : WILEY-BLACKWELL
Pages: - Volume / Issue: 252 (3) Sequence Number: - Start / End Page: 258 - 262 Identifier: ISSN: 0022-2720