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  Point-spread functions for backscattered imaging in the scanning electron microscope

Hennig, P. (2007). Point-spread functions for backscattered imaging in the scanning electron microscope. Journal of Applied Physics, 102(12), 1-8. doi:10.1063/1.2817591.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0013-CAEB-3 Version Permalink: http://hdl.handle.net/11858/00-001M-0000-0013-CAEC-1
Genre: Journal Article

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Hennig, P1, Author              
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1Department Empirical Inference, Max Planck Institute for Biological Cybernetics, Max Planck Society, escidoc:1497795              

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 Abstract: One knows the imaging system's properties are central to the correct interpretation of any image. In a scanning electron microscope regions of different composition generally interact in a highly nonlinear way during signal generation. Using Monte Carlo simulations we found that in resin-embedded, heavy metal-stained biological specimens staining is sufficiently dilute to allow an approximately linear treatment. We then mapped point-spread functions for backscattered-electron contrast, for primary energies of 3 and 7 keV and for different detector specifications. The point-spread functions are surprisingly well confined (both laterally and in depth) compared even to the distribution of only those scattered electrons that leave the sample again.

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 Dates: 2007-12
 Publication Status: Published in print
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 Identifiers: URI: http://jap.aip.org/resource/1/japiau/v102/i12/p123101_s1
DOI: 10.1063/1.2817591
BibTex Citekey: HennigD2007
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Title: Journal of Applied Physics
Source Genre: Journal
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Pages: - Volume / Issue: 102 (12) Sequence Number: - Start / End Page: 1 - 8 Identifier: -