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  Nanopatterning by biological templating and laser direct writing in thin laser deposited films

Gorbunov, A. A., Mertig, M., Kirsch, R., Eichler, H., Pompe, W., & Engelhardt, H. (1997). Nanopatterning by biological templating and laser direct writing in thin laser deposited films. Applied Surface Science, 110, 621-625.

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Gorbunov, A. A., Autor
Mertig, M., Autor
Kirsch, R., Autor
Eichler, H., Autor
Pompe, W., Autor
Engelhardt, H.1, Autor           
Affiliations:
1External Organizations, ou_persistent22              

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Schlagwörter: Surface-layer.; Physical chemistry/chemical physics. Materials science and engineering.
 Zusammenfassung: We report on three alternative approaches to laser-supported sub-micro- and nanopatterning of ultrathin films. The inherent non-linearities of direct writing techniques can be used to fabricate structures far below the optical resolution limit. Due to the non-linear dependence of light absorption and reaction rate on film thickness and temperature (a) the lateral self-limitation of the oxidation reaction in ultrathin titanium films on a transparent heat insulating substrate in air can occur. The polarization of sharp conducting tips results in (b) near-field enhancement of the optical field in nanometer regions that allows diminishing of the effective size of the radiation source. The third approach (c) is based on the nanometer-period pattern transfer from a biomolecular template to a Pt/C overlayer deposited by cross-beam pulsed laser deposition. [References: 14]

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 Datum: 1997-02
 Publikationsstatus: Erschienen
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 Identifikatoren: eDoc: 318449
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Titel: Applied Surface Science
Genre der Quelle: Zeitschrift
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Seiten: - Band / Heft: 110 Artikelnummer: - Start- / Endseite: 621 - 625 Identifikator: -