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  Deposition of B4C/BCN/c-BN multilayered thin films by r.f. magnetron sputtering

Bejarano, G., Caicedo, J. M., Baca, E., Prieto, P., Balogh, A. G., & Enders, S. (2006). Deposition of B4C/BCN/c-BN multilayered thin films by r.f. magnetron sputtering. Thin Solid Films, 494(1-2), 53-57.

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 Creators:
Bejarano, G.1, Author
Caicedo, J. M.1, Author
Baca, E.1, Author
Prieto, P.1, Author
Balogh, A. G.1, Author
Enders, S.2, Author           
Affiliations:
1Departamento de Física, Universidad del Valle, A.A. 25360, Cali, Colombia; Laboratorio de Recubrimientos Duros del CDT-ASTIN SENA, Cali, Colombia; Institute for Material Science, Darmstadt University of Technology, Germany, ou_persistent22              
2Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655              

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Free keywords: MPI für Metallforschung; Abt. Arzt; Cubic boron nitride; Magnetron sputtering; Multilayers; Hard coatings adhesion improvement
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Language(s): eng - English
 Dates: 2006-08-042006-01-03
 Publication Status: Issued
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 284929
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Title: Thin Solid Films
Source Genre: Journal
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Pages: - Volume / Issue: 494 (1-2) Sequence Number: - Start / End Page: 53 - 57 Identifier: -