Structure of sputtered nanocomposite CrCx/a-C:H thin films

Gassner, G.; Patscheider, J.; Mayrhofer, P. H.; Hegedus, E.; Toth, L.; Kovacs, I.; Pecz, B.; Srot, V.; Scheu, C.; Mitterer, C.

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Structure of sputtered nanocomposite CrC_x/a-C:H thin films

Gassner, G., Patscheider, J., Mayrhofer, P. H., Hegedus, E., Toth, L., Kovacs, I., et al. (2006). Structure of sputtered nanocomposite CrC_x/a-C:H thin films. Journal of Vacuum Science & Technology B, 24(4), 1837-1843.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-45BE-2 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-45BF-F

Genre: Journal Article

Alternative Title : J. Vac. Sci. Technol. B

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Creators:
Gassner, G.¹, Author
Patscheider, J.¹, Author
Mayrhofer, P. H.¹, Author
Hegedus, E.¹, Author
Toth, L.¹, Author
Kovacs, I.¹, Author
Pecz, B.¹, Author
Srot, V.^{2, 3}, Author
Scheu, C.², Author
Mitterer, C.¹, Author

Affiliations:
1Univ Leoben, Dept Phys Met & Mat Testing, A-8700 Leoben, Austria.; EMPA, Lab Nanoscale Mat Sci, CH-8600 Dubendorf, Switzerland.; Rhein Westfal TH Aachen, D-52074 Aachen, Germany.; MFA Res Inst Tech Phys & Mat Sci, H-1121 Budapest, Hungary.; Mat Ctr Leoben, A-8700 Leoben, Austria., ou_persistent22
2Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497657
3Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497669

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Free keywords: MPI für Metallforschung; Zentrum für Transmissionslektronenmikroskopie;

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Language(s): eng - English

Dates: Date issued: 2006-07

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 297863
ISI: 000239890000026

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Title: Journal of Vacuum Science & Technology B

Alternative Title : J. Vac. Sci. Technol. B

Source Genre: Journal

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Pages: - Volume / Issue: 24 (4) Sequence Number: - Start / End Page: 1837 - 1843 Identifier: ISSN: 1071-1023