Electron backscattering in sputter depth profiling using AED, EPES, and REELS

Hofmann, S.

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Electron backscattering in sputter depth profiling using AED, EPES, and REELS

Hofmann, S. (2008). Electron backscattering in sputter depth profiling using AED, EPES, and REELS. Journal of Surface Analysis, 15(2), 130-138.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-4170-1 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-4171-0

Genre: Journal Article

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Creators:
Hofmann, S.¹, Author

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1Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644

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Free keywords: MPI für Metallforschung; Emeriti and Others;

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Language(s): eng - English

Dates: Date issued: 2008

Publication Status: Issued

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Identifiers: eDoc: 395318

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Title: Journal of Surface Analysis

Source Genre: Journal

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Pages: - Volume / Issue: 15 (2) Sequence Number: - Start / End Page: 130 - 138 Identifier: -