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  Transmission electron microscopy study of the platinum germanide formation process in the Ge/Pt/Ge/SiO2/Si structure

Laszcz, A., Ratajczak, J., Czerwinski, A., Katcki, J., Srot, V., Phillipp, F., et al. (2008). Transmission electron microscopy study of the platinum germanide formation process in the Ge/Pt/Ge/SiO2/Si structure. Materials Science and Engineering B, 154–155, 175-178.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-416A-2 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-416B-F
Genre: Conference Paper

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 Creators:
Laszcz, A.1, Author
Ratajczak, J.1, Author
Czerwinski, A.1, Author
Katcki, J.1, Author
Srot, V.2, Author           
Phillipp, F.2, Author           
van Aken, P. A.2, Author           
Breil, N.1, Author
Larrieu, G.1, Author
Dubois, E.1, Author
Affiliations:
1Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warsaw, Poland;IEMN/ISEN, UMRS CNRS 8520, Avenue Poincare, Cite Scientifique, BP 69, 59652 Villeneuve d’ Ascq Cedex, France;STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles, France., ou_persistent22              
2Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497669              

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Free keywords: MPI für Metallforschung; Stuttgart Center for Electron Microscopy (StEM);
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Language(s): eng - English
 Dates: 2008
 Publication Status: Issued
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 394967
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Title: E-MRS Spring Meeting 2008
Place of Event: Strasbourg, France
Start-/End Date: 2008-05-26 - 2008-05-30

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Title: Materials Science and Engineering B
Source Genre: Journal
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Publ. Info: -
Pages: - Volume / Issue: 154–155 Sequence Number: - Start / End Page: 175 - 178 Identifier: -