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  Quantitative local strain analysis of Si/SiGe heterostructures using HRTEM

Özdöl, V. B., Phillipp, F., Kasper, E., & van Aken, P. A. (2008). Quantitative local strain analysis of Si/SiGe heterostructures using HRTEM. In M. Luysberg, K. Tillmann, & T. Weirich (Eds.), EMC2008, 14th European Microscopy Congress, Vol. 1: Instrumentation and Methods (pp. 141-142). Berlin [et al.]: Springer.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-40E8-0 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-40E9-E
Genre: Conference Paper

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 Creators:
Özdöl, V. B.1, Author           
Phillipp, F.1, Author           
Kasper, E.2, Author
van Aken, P. A.1, Author           
Affiliations:
1Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497669              
2Institute for Semiconductor Engineering, Stuttgart University, Pfaffenwaldring 47,D-70569 Stuttgart, Germany, ou_persistent22              

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Free keywords: MPI für Intelligente Systeme; Stuttgart Center for Electron Microscopy (StEM);
 Abstract: -

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Language(s): eng - English
 Dates: 2008
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Internal
 Identifiers: eDoc: 376637
DOI: 10.1007/978-3-540-85226-1_71
 Degree: -

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Title: 14th European Microscopy Congress
Place of Event: Aachen, Germany
Start-/End Date: 2008-09-01 - 2008-09-05

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Title: EMC2008, 14th European Microscopy Congress, Vol. 1: Instrumentation and Methods
Source Genre: Proceedings
 Creator(s):
Luysberg, M., Editor
Tillmann, K., Editor
Weirich, T., Editor
Affiliations:
-
Publ. Info: Berlin [et al.] : Springer
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 141 - 142 Identifier: -