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  Investigation of the bulge test response of molybdenum thin films at room temperature and at 100 °C

Walter, M. E., Schneider, A. S., Wübben, T., Richter, G., & Arzt, E. (2009). Investigation of the bulge test response of molybdenum thin films at room temperature and at 100 °C. Strain, 45, 238-248. doi:10.1111/j.1475-1305.2008.00496.x.

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 Creators:
Walter, M. E.1, Author
Schneider, A. S.2, Author           
Wübben, T.2, Author           
Richter, G.3, 4, Author           
Arzt, E.2, 5, Author           
Affiliations:
1Department of Mechanical Engineering, E331 Scott Laboratory; The Ohio State University, Columbus, OH, USA; Infineon, Villach, Österreich; Leibniz-Institut für Neue Materialien gGmbH, Saarbrücken, ou_persistent22              
2Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655              
3Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497657              
4Central Scientific Facility Thin Film Laboratory, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497640              
5Universität Stuttgart, Institut für Metallkunde, ou_persistent22              

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Free keywords: MPI für Metallforschung; Abt. Arzt;
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Language(s): eng - English
 Dates: 2009
 Publication Status: Issued
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 431671
DOI: 10.1111/j.1475-1305.2008.00496.x
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Title: Strain
Source Genre: Journal
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Pages: - Volume / Issue: 45 Sequence Number: - Start / End Page: 238 - 248 Identifier: -