Evaluation of the depth resolutions of auger electron spectroscopic, X-ray 
photoelectron spectroscopic and time-of-flight secondary-ion mass spectrometric 
sputter depth profiling techniques

Wang, J. Y.; Starke, U.; Mittemeijer, E. J.

doi:10.1016/j.tsf.2009.01.007

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Evaluation of the depth resolutions of auger electron spectroscopic, X-ray photoelectron spectroscopic and time-of-flight secondary-ion mass spectrometric sputter depth profiling techniques

Wang, J. Y., Starke, U., & Mittemeijer, E. J. (2009). Evaluation of the depth resolutions of auger electron spectroscopic, X-ray photoelectron spectroscopic and time-of-flight secondary-ion mass spectrometric sputter depth profiling techniques. Thin Solid Films, 517, 3402-3407. doi:10.1016/j.tsf.2009.01.007.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-3DD0-C Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-3DD1-A

Genre: Journal Article

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Creators:
Wang, J. Y.¹, Author
Starke, U., Author
Mittemeijer, E. J.^{1, 2}, Author

Affiliations:
1Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644
2Universität Stuttgart, Institut für Materialwissenschaft, ou_persistent22

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Free keywords: MPI für Metallforschung; Abt. Mittemeijer;

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Language(s): eng - English

Dates: Date issued: 2009

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 430725
DOI: 10.1016/j.tsf.2009.01.007

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Title: Thin Solid Films

Source Genre: Journal

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Pages: - Volume / Issue: 517 Sequence Number: - Start / End Page: 3402 - 3407 Identifier: -