Strain mapping of 45 nm MOSFET by dark-field inline electron holography

Özdöl, V. B.; Koch, C. T.; van Aken, P. A.

doi:10.1017/S1431927610057090

Local TagsRelease HistoryDetailsSummary

Strain mapping of 45 nm MOSFET by dark-field inline electron holography

Özdöl, V. B., Koch, C. T., & van Aken, P. A. (2010). Strain mapping of 45 nm MOSFET by dark-field inline electron holography. Microscopy and Microanalysis, 16(Suppl. 2), 592-593.

Item is Released

show all hide all

Basic

show hide

Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-3C13-7 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-3C14-5

Genre: Conference Paper

Alternative Title : Microsc. Microanal.

Files

show Files

Locators

show

Creators

show

hide

Creators:
Özdöl, V. B.¹, Author
Koch, C. T.^{1, 2}, Author
van Aken, P. A.¹, Author

Affiliations:
1Stuttgart Center for Electron Microscopy, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497669
2Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497657

Content

show

hide

Free keywords: MPI für Metallforschung; Stuttgart Center for Electron Microscopy (StEM);

Abstract: -

Details

show

hide

Language(s): eng - English

Dates: Date issued: 2010

Publication Status: Issued

Pages: -

Publishing info: -

Table of Contents: -

Rev. Type: Internal

Identifiers: eDoc: 493457
DOI: 10.1017/S1431927610057090

Degree: -

Event

show

hide

Title: Microscopy and Microanalysis 2010

Place of Event: Portland, Oregon, USA

Start-/End Date: 2010-08-01 - 2010-08-05

Legal Case

show

Project information

show

Source 1

show

hide

Title: Microscopy and Microanalysis

Alternative Title : Microsc. Microanal.

Source Genre: Journal

Creator(s):

Affiliations:

Publ. Info: -

Pages: - Volume / Issue: 16 (Suppl. 2) Sequence Number: - Start / End Page: 592 - 593 Identifier: -