Analysis of local strain in aluminium interconnects by energy filtered CBED

Krämer, S.; Mayer, J.; Weickenmeier, A.; Rühle, M.

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Analysis of local strain in aluminium interconnects by energy filtered CBED

Krämer, S., Mayer, J., Weickenmeier, A., & Rühle, M. (2000). Analysis of local strain in aluminium interconnects by energy filtered CBED. Ultramicroscopy, 81, 245-262.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-39E0-2 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-39E1-F

Genre: Journal Article

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Creators:
Krämer, S.¹, Author
Mayer, J.¹, Author
Weickenmeier, A.¹, Author
Rühle, M.¹, Author

Affiliations:
1Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497657

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Free keywords: MPI für Metallforschung; Ehemalige Abt. Rühle;

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Language(s): eng - English

Dates: Date issued: 2000

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 245003

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Title: Ultramicroscopy

Source Genre: Journal

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Pages: - Volume / Issue: 81 Sequence Number: - Start / End Page: 245 - 262 Identifier: -