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  Ultimate depth resolution and profile reconstruction in sputter profiling with AES and SIMS

Hofmann, S. (2000). Ultimate depth resolution and profile reconstruction in sputter profiling with AES and SIMS. Surface and Interface Analysis, 30, 228-233.

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 Creators:
Hofmann, S.1, Author           
Affiliations:
1Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644              

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Free keywords: MPI für Metallforschung; Abt. Mittemeijer;
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 Dates: 2000
 Publication Status: Issued
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 Rev. Type: Peer
 Identifiers: eDoc: 200582
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Title: Surface and Interface Analysis
Source Genre: Journal
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Pages: - Volume / Issue: 30 Sequence Number: - Start / End Page: 228 - 233 Identifier: -