English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT
 
 
DownloadE-Mail
 Local TagsRelease HistoryDetailsSummary
  Localized measurement of strains in damascene copper interconnects by convergent-beam electron diffraction

Nucci, J. A. R., Keller, R., Krämer, S., Volkert, C. A., & Gross, M. (2000). Localized measurement of strains in damascene copper interconnects by convergent-beam electron diffraction. In K. Maex, Y.-C. Joo, G. S. Oehrlein, S. Ogawa, & J. T. Wetzel (Eds.), Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics (pp. D 851-D 856). Warrendale: MRS.

Item is

 

show all hide all

Basic

show hide
Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-38C6-6 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-38C7-4
Genre: Conference Paper

Files

show Files

Locators

show

Creators

show
hide
 Creators:
Nucci, J. A. R., Author
Keller, R., Author
Krämer, S.1, Author           
Volkert, C. A.2, Author           
Gross, M., Author
Affiliations:
1Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497657              
2Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655              

Content

show
hide
Free keywords: MPI für Metallforschung; Abt. Arzt;
 Abstract: -

Details

show
hide
Language(s): eng - English
 Dates: 2000
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 199006
 Degree: -

Event

show
hide
Title: Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
Place of Event: San Francisco, Calif.
Start-/End Date: 2000-04-23 - 2000-04-27

Legal Case

show

Project information

show

Source 1

show
hide
Title: Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
Source Genre: Proceedings
 Creator(s):
Maex, K., Editor
Joo, Y-C., Editor
Oehrlein, G. S., Editor
Ogawa, S., Editor
Wetzel, J. T., Editor
Affiliations:
-
Publ. Info: Warrendale : MRS
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: D 851 - D 856 Identifier: -

Source 2

show
hide
Title: Materials Research Society Symposia Proceedings
Source Genre: Series
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 612 Sequence Number: - Start / End Page: - Identifier: -