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  Diffusional Hillock formation in Al thin films contolled by creep

Kim, D., Nix, W. D., Arzt, E., Deal, M. D., & Plummer, J. D. (2000). Diffusional Hillock formation in Al thin films contolled by creep. In R. Vinci, O. Kraft, N. Moody, P. Besser, & E. Shaffer II (Eds.), Thin Films: Stresses and Mechanical Properties VIII (pp. 129-134). Warrendale/PA: MRS.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-3890-D Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-3891-B
Genre: Conference Paper

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 Creators:
Kim, D.1, Author
Nix, W. D.1, Author
Arzt, E.2, 3, Author           
Deal, M. D.1, Author
Plummer, J. D.1, Author
Affiliations:
1Thin Films: Stresses and Mechanical Properties VIII External Publication Status: published Place of Conference/Meeting: Place of Publication: Name of Conference/Meeting: Review Status: not specified Publisher: Materials Research Society Audience: Experts Only Volume (in Series): 594 Full Name(s) of Editor(s) of Proceedings:, ou_persistent22              
2Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655              
3Universität Stuttgart, Institut für Metallkunde, ou_persistent22              

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Free keywords: MPI für Metallforschung; Abt. Arzt;
 Abstract: -

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Language(s): eng - English
 Dates: 2000
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 198959
 Degree: -

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Title: Thin Films: Stresses and Mechanical Properties VIII. Symposium V at the 1999 MRS Fall Meeting
Place of Event: Boston, Mass.
Start-/End Date: 1999-11-29 - 1999-12-03

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Title: Thin Films: Stresses and Mechanical Properties VIII
Source Genre: Proceedings
 Creator(s):
Vinci, R., Editor
Kraft, O.1, Editor           
Moody, N., Editor
Besser, P., Editor
Shaffer II, E., Editor
Affiliations:
1 Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655            
Publ. Info: Warrendale/PA : MRS
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 129 - 134 Identifier: -

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Title: Materials Research Symposium Proceedings
Source Genre: Series
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Publ. Info: -
Pages: - Volume / Issue: 594 Sequence Number: - Start / End Page: - Identifier: -