Microstructure of thermal hillocks on blanket Al thin films

Kim, D.; Heiland, B.; Nix, W. D.; Arzt, E.; Deal, M. D.; Plummer, J. D.

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Microstructure of thermal hillocks on blanket Al thin films

Kim, D., Heiland, B., Nix, W. D., Arzt, E., Deal, M. D., & Plummer, J. D. (2000). Microstructure of thermal hillocks on blanket Al thin films. Thin Solid Films, 371, 278-282.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-3810-F Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-3811-D

Genre: Journal Article

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Creators:
Kim, D., Author
Heiland, B.¹, Author
Nix, W. D., Author
Arzt, E.^{1, 2}, Author
Deal, M. D., Author
Plummer, J. D., Author

Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655
2Universität Stuttgart, Institut für Metallkunde, ou_persistent22

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Free keywords: MPI für Metallforschung; Abt. Arzt;

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Language(s): eng - English

Dates: Date issued: 2000

Publication Status: Issued

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Identifiers: eDoc: 198853

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Title: Thin Solid Films

Source Genre: Journal

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Pages: - Volume / Issue: 371 Sequence Number: - Start / End Page: 278 - 282 Identifier: -