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  Texture of Sputtered Thin Copper Films on Amorphous SiO2 und Si3N4 Substrates

Okolo, B., Lamparter, P., Welzel, U., Wagner, T., & Mittemeijer, E. J. (2002). Texture of Sputtered Thin Copper Films on Amorphous SiO2 und Si3N4 Substrates. In C. Ozkan, R. Cammarata, L. Freund, & H. Gao (Eds.), Thin Films: Stresses and Mechanical Properties IX (pp. L2.9-L2.14). Warrendale, PA: MRS.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-331A-7 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-331B-5
Genre: Conference Paper

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43-ar_2002.pdf (Abstract), 51KB
 
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 Creators:
Okolo, B.1, Author           
Lamparter, P.1, Author           
Welzel, U.1, Author           
Wagner, T.2, Author           
Mittemeijer, E. J.1, 3, Author           
Affiliations:
1Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644              
2Central Scientific Facility Thin Film Laboratory, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497640              
3Universität Stuttgart, Institut für Materialwissenschaft, ou_persistent22              

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Free keywords: MPI für Metallforschung; Abt. Mittemeijer; Abt. Arzt; 43-ar_2002; 20-mi_2002;
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Language(s): eng - English
 Dates: 2002
 Publication Status: Issued
 Pages: -
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 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 13067
 Degree: -

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Title: Thin Films: Stresses and Mechanical Properties IX. Symposium
Place of Event: Boston, Mass. [USA]
Start-/End Date: 2001-11-26 - 2001-11-30

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Title: Thin Films: Stresses and Mechanical Properties IX
Source Genre: Proceedings
 Creator(s):
Ozkan, C.S., Editor
Cammarata, R.C., Editor
Freund, L.B., Editor
Gao, H.1, Editor           
Affiliations:
1 Former Dept. Theory of Mesoscopic Phenomena, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497656            
Publ. Info: Warrendale, PA : MRS
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: L2.9 - L2.14 Identifier: -

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Title: Materials Research Society Symposium Proceedings
Source Genre: Series
 Creator(s):
Materials Research Society, Editor              
Affiliations:
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Publ. Info: -
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: - Identifier: -