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  Grain growth in magnetron-sputtered nickel films

Wagner, T., & Müller, D. (2002). Grain growth in magnetron-sputtered nickel films. Zeitschrift für Metallkunde, 93(5), 401-405.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-316B-1 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-316C-0
Genre: Journal Article
Alternative Title : Z. Metallk.

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20-ar_2002.pdf (Abstract), 64KB
 
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 Creators:
Wagner, T.1, Author           
Müller, D., Author
Affiliations:
1Central Scientific Facility Thin Film Laboratory, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497640              

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Free keywords: MPI für Metallforschung; MPI für Metallforschung; Abt. Arzt; Abt. Arzt; ZWE Dünnschichtlabor; 20-ar_2002; PVD; sputtering; nickel; grain growth
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Language(s): eng - English
 Dates: 2002-05
 Publication Status: Issued
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 Rev. Type: Peer
 Identifiers: eDoc: 6780
ISI: 000176310600009
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Title: Zeitschrift für Metallkunde
  Alternative Title : Z. Metallk.
Source Genre: Journal
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Pages: - Volume / Issue: 93 (5) Sequence Number: - Start / End Page: 401 - 405 Identifier: ISSN: 0044-3093