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  Summary of ISO/TC 201 Technical Report: ISO/TR 15969:2000 - Surface chemical analysis - Depth profiling - Measurement of sputtered depth

Hofmann, S. (2002). Summary of ISO/TC 201 Technical Report: ISO/TR 15969:2000 - Surface chemical analysis - Depth profiling - Measurement of sputtered depth. Surface and Interface Analysis, 33(5), 453-454.

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Genre: Journal Article
Alternative Title : Surf. Interface Anal.

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 Creators:
Hofmann, S.1, Author           
Affiliations:
1Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644              

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Free keywords: MPI für Metallforschung; Abt. Mittemeijer; surface analysis; sputter depth profiling; crater depth; sputtering rate
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Language(s): eng - English
 Dates: 2002-05
 Publication Status: Issued
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 6823
ISI: 000175780000013
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Title: Surface and Interface Analysis
  Alternative Title : Surf. Interface Anal.
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 33 (5) Sequence Number: - Start / End Page: 453 - 454 Identifier: ISSN: 0142-2421