Improvement of the depth resolution in sputter depth profiling by elastic peak 
electron spectroscopy

Kesler, V.; Hofmann, S.

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Improvement of the depth resolution in sputter depth profiling by elastic peak electron spectroscopy

Kesler, V., & Hofmann, S. (2002). Improvement of the depth resolution in sputter depth profiling by elastic peak electron spectroscopy. Surface and Interface Analysis, 33(8), 635-639.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-3054-C Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-3055-A

Genre: Journal Article

Alternative Title : Surf. Interface Anal.

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Creators:
Kesler, V.¹, Author
Hofmann, S.², Author

Affiliations:
1SB AS Russia, Inst Semicond Phys, Novosibirsk, Russia, ou_persistent22
2Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644

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Free keywords: MPI für Metallforschung; Abt. Mittemeijer; depth profiling; elastic peak spectroscopy; Ge/Si multilayers; MRI model

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Language(s): eng - English

Dates: Date issued: 2002-08

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 6727
ISI: 000177531100002

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Title: Surface and Interface Analysis

Alternative Title : Surf. Interface Anal.

Source Genre: Journal

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Pages: - Volume / Issue: 33 (8) Sequence Number: - Start / End Page: 635 - 639 Identifier: ISSN: 0142-2421