Growth of electromigration-induced hillocks in Al interconnects

Nucci, J. A.; Straub, A.; Bischoff, E.; Arzt, E.; Volkert, C. A.

Local TagsRelease HistoryDetailsSummary

Growth of electromigration-induced hillocks in Al interconnects

Nucci, J. A., Straub, A., Bischoff, E., Arzt, E., & Volkert, C. A. (2002). Growth of electromigration-induced hillocks in Al interconnects. Journal of Materials Research, 17(10), 2727-2735.

Item is Released

show all hide all

Basic

show hide

Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2FE6-B Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2FE7-9

Genre: Journal Article

Alternative Title : J. Mater. Res.

Files

show Files

hide Files

:

41-ar_2002.pdf (Abstract), 57KB

File Permalink:
-

Name:
41-ar_2002.pdf

Description:
-

OA-Status:

Visibility:
Restricted (Max Planck Institute for Intelligent Systems, MSMT; )

MIME-Type / Checksum:
application/pdf

Technical Metadata:

Copyright Date:
-

Copyright Info:
eDoc_access: INSTITUT

License:
-

Locators

show

Creators

show

hide

Creators:
Nucci, J. A.¹, Author
Straub, A.¹, Author
Bischoff, E.^{2, 3}, Author
Arzt, E.^{1, 4}, Author
Volkert, C. A.¹, Author

Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655
2Former Central Scientific Facility Metallography, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497652
3Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society, DE, ou_1497657
4Universität Stuttgart, Institut für Metallkunde, ou_persistent22

Content

show

hide

Free keywords: MPI für Metallforschung; Abt. Arzt; Abt. Rühle; ZWE Metallographie; 41-ar_2002;

Abstract: -

Details

show

hide

Language(s): eng - English

Dates: Date issued: 2002-10

Publication Status: Issued

Pages: -

Publishing info: -

Table of Contents: -

Rev. Type: Peer

Identifiers: eDoc: 6693
ISI: 000178351400035

Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show

hide

Title: Journal of Materials Research

Alternative Title : J. Mater. Res.

Source Genre: Journal

Creator(s):

Affiliations:

Publ. Info: -

Pages: - Volume / Issue: 17 (10) Sequence Number: - Start / End Page: 2727 - 2735 Identifier: ISSN: 0884-2914