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  AES depth profiling of thermally treated Al/Si thin-film structures

Zalar, A., Wang, J., Zhao, Y., Mittemeijer, E., & Panjan, P. (2003). AES depth profiling of thermally treated Al/Si thin-film structures. Vacuum, 71, 11-17.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2D73-8 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2D74-6
Genre: Journal Article

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Zalar, A., Author
Wang, J.Y.1, Author           
Zhao, Y.H.1, Author           
Mittemeijer, E.J.1, 2, Author           
Panjan, P., Author
Affiliations:
1Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644              
2Universität Stuttgart, Institut für Materialwissenschaft, ou_persistent22              

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Free keywords: MPI für Metallforschung; Abt. Mittemeijer;
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Language(s): eng - English
 Dates: 2003
 Publication Status: Issued
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 Identifiers: eDoc: 47144
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Title: Vacuum
Source Genre: Journal
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Pages: - Volume / Issue: 71 Sequence Number: - Start / End Page: 11 - 17 Identifier: -