Mikrostruktur und Eigenschaften von Titannitrid/Siliciumnitrid-Schichten

Kauffmann, F.

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Mikrostruktur und Eigenschaften von Titannitrid/Siliciumnitrid-Schichten

Kauffmann, F. (2003). Mikrostruktur und Eigenschaften von Titannitrid/Siliciumnitrid-Schichten. PhD Thesis, Universität Stuttgart, Stuttgart.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2C56-1 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2C57-0

Genre: Thesis

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Creators:
Kauffmann, F.¹, Author

Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655

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Free keywords: MPI für Metallforschung; Abt. Arzt;

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Language(s): deu - German

Dates: Accepted: 2003-08-29

Publication Status: Accepted / In Press

Pages: 109 S.

Publishing info: Stuttgart : Universität Stuttgart

Table of Contents: -

Rev. Type: -

Identifiers: eDoc: 111960
URI: http://elib.uni-stuttgart.de/opus/volltexte/2004/1587/

Degree: PhD

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