Analysis of local strain in aluminum interconnects by convergent beam electron 
diffraction

Krämer, S.; Volkert, C. A.; Mayer, J.

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Analysis of local strain in aluminum interconnects by convergent beam electron diffraction

Krämer, S., Volkert, C. A., & Mayer, J. (2003). Analysis of local strain in aluminum interconnects by convergent beam electron diffraction. Microscopy and Microanalysis, 9(5), 390-398.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2C3C-0 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2C3D-E

Genre: Journal Article

Alternative Title : Microsc. Microanal.

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Creators:
Krämer, S.¹, Author
Volkert, C. A.², Author
Mayer, J.¹, Author

Affiliations:
1Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497657
2Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655

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Free keywords: MPI für Metallforschung; Abt. Rühle; transmission electron microscopy, CBED, energy filtered imaging and diffraction, focused ion beam, data processing, image processing, thin films, finite element modeling

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Language(s): eng - English

Dates: Date issued: 2003-10

Publication Status: Issued

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Identifiers: eDoc: 112089
ISI: 000185730800003

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Title: Microscopy and Microanalysis

Alternative Title : Microsc. Microanal.

Source Genre: Journal

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Pages: - Volume / Issue: 9 (5) Sequence Number: - Start / End Page: 390 - 398 Identifier: ISSN: 1431-9276