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  Layered nanostructures for the determination of physical parameters in sputter depth profiling

Hofmann, S. (2004). Layered nanostructures for the determination of physical parameters in sputter depth profiling. In Proceedings of the First International Symposium on Standard Materials and Metrology for Nanotechnology (SMAM 1) (pp. 20-27).

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2BCF-C Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2BD0-6
Genre: Conference Paper

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 Creators:
Hofmann, S.1, Author           
Affiliations:
1Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644              

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Free keywords: MPI für Intelligente Systeme; Emeriti and Others;
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Language(s): eng - English
 Dates: 2004
 Publication Status: Issued
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 Rev. Type: -
 Identifiers: eDoc: 218232
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Title: First International Symposium on Standard Materials and Metrology for Nanotechnology
Place of Event: Tokyo
Start-/End Date: 2004-03-15 - 2004-03-16

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Title: Proceedings of the First International Symposium on Standard Materials and Metrology for Nanotechnology (SMAM 1)
Source Genre: Proceedings
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Publ. Info: -
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 20 - 27 Identifier: -