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  Sputter-depth profiling for thin-film analysis

Hofmann, S. (2004). Sputter-depth profiling for thin-film analysis. Philosophical of the Transactions Royal Society of London A, 362, 55-75.

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Hofmann, S.1, Author           
Affiliations:
1Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644              

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Free keywords: MPI für Metallforschung; Abt. Mittemeijer;
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Language(s): eng - English
 Dates: 2004
 Publication Status: Issued
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 Identifiers: eDoc: 124094
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Title: Philosophical of the Transactions Royal Society of London A
Source Genre: Journal
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Pages: - Volume / Issue: 362 Sequence Number: - Start / End Page: 55 - 75 Identifier: -