Depth Dependences of the Ion Bombardment Induced Roughness and of the 
Interdiffusion Coefficient for Si/Al Multilayers.

Wang, J. Y.; Zalar, A.; Mittemeijer, E. J.

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Depth Dependences of the Ion Bombardment Induced Roughness and of the Interdiffusion Coefficient for Si/Al Multilayers.

Wang, J. Y., Zalar, A., & Mittemeijer, E. J. (2004). Depth Dependences of the Ion Bombardment Induced Roughness and of the Interdiffusion Coefficient for Si/Al Multilayers. Applied Surface Science, 222, 171-179.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-29D7-8 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-29D8-6

Genre: Journal Article

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Creators:
Wang, J. Y.¹, Author
Zalar, A., Author
Mittemeijer, E. J.^{1, 2}, Author

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1Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644
2Universität Stuttgart, Institut für Materialwissenschaft, ou_persistent22

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Free keywords: MPI für Metallforschung; Abt. Mittemeijer;

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Language(s): eng - English

Dates: Date issued: 2004

Publication Status: Issued

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Title: Applied Surface Science

Source Genre: Journal

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Pages: - Volume / Issue: 222 Sequence Number: - Start / End Page: 171 - 179 Identifier: -