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  Coupling between precipitation and plastic deformation during electromigration in a passivated Al (0.5wt%Cu) interconnect

Barabash, R. I., Ice, G. E., Tamura, N., Valek, B. C., Spolenak, R., Bravman, J. C., et al. (2004). Coupling between precipitation and plastic deformation during electromigration in a passivated Al (0.5wt%Cu) interconnect. In R. Carter, C. Hau-Riege, G. Kloster, T.-M. Lu, & S. Schulz (Eds.), Materials, Technology, Annealability for Advanced Interconnects and Low-k Dieelectrics (pp. F7.4.1-F7.4.10). Materials Research Society.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2916-9 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2917-7
Genre: Conference Paper

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 Creators:
Barabash, R. I.1, Author
Ice, G. E.1, Author
Tamura, N.1, Author
Valek, B. C.1, Author
Spolenak, R.2, Author           
Bravman, J. C.1, Author
Patel, J. R.1, Author
Affiliations:
1Metals & Ceramics Divisions, Oak Ridge National Laboratory, Oak Ridge TN 37831; Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley CA 94720; Dept. Materials Science & Engineering, Stanford University, Stanford CA 94305;, ou_persistent22              
2Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655              

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Free keywords: MPI für Metallforschung; Abt. Arzt;
 Abstract: -

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Language(s): eng - English
 Dates: 2004-06-20
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 174881
 Degree: -

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Title: Materials, Technology, Annealability for Advanced Interconnects and Low-k Dieelectrics. Symposium at the MRS Spring Meeting 2004
Place of Event: San Francisco
Start-/End Date: 2004-04-12 - 2004-04-16

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Title: Materials, Technology, Annealability for Advanced Interconnects and Low-k Dieelectrics
Source Genre: Proceedings
 Creator(s):
Carter, R., Editor
Hau-Riege, C., Editor
Kloster, G., Editor
Lu, T-M., Editor
Schulz, S.1, Editor           
Affiliations:
1 Dept. New Materials and Biosystems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497649            
Publ. Info: Materials Research Society
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: F7.4.1 - F7.4.10 Identifier: -

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Title: Materials Research Society Symposium Proceedings
Source Genre: Series
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Publ. Info: -
Pages: - Volume / Issue: 812 Sequence Number: - Start / End Page: - Identifier: -