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  Unexpected mode of plastic deformation in Cu damascene lines undergoing electromigration

Budiman, A. S., Tamura, N., Valek, B. C., Gadre, K., Maiz, J., Spolenak, R., et al. (2004). Unexpected mode of plastic deformation in Cu damascene lines undergoing electromigration. In R. Carter, C. Hau-Riege, G. Kloster, T.-M. Lu, & S. Schulz (Eds.), Materials, Technology, Annealability for Advanced Interconnects and Low-k Dieelectrics (pp. F7.3.1-F7.3.6). Boston: MRS.

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 Creators:
Budiman, A. S.1, Author
Tamura, N.1, Author
Valek, B. C.1, Author
Gadre, K.1, Author
Maiz, J.1, Author
Spolenak, R.2, Author           
Caldwell, W. A.1, Author
Nix, W. D.1, Author
Patel, J. R.1, Author
Affiliations:
1Department of Materials Science & Engineering, Stanford University, Stanford, California 94305; Advanced Light Source (ALS), Lawrence Berkeley National Laboratory (LBNL), 1 Cyclotron Rd., Berkeley, California 94720; Intel Corporation, Hillsboro, Oregon 97124;, ou_persistent22              
2Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655              

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Free keywords: MPI für Intelligente Systeme; Ehemalige Abt. Arzt;
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Language(s): eng - English
 Dates: 2004-06-20
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 174879
 Degree: -

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Title: Materials, Technology, Annealability for Advanced Interconnects and Low-k Dieelectrics. Symposium at the MRS Spring Meeting 2004
Place of Event: San Francisco
Start-/End Date: 2004-04-12 - 2004-04-16

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Title: Materials, Technology, Annealability for Advanced Interconnects and Low-k Dieelectrics
Source Genre: Proceedings
 Creator(s):
Carter, R., Editor
Hau-Riege, C., Editor
Kloster, G., Editor
Lu, T-M., Editor
Schulz, S.1, Editor           
Affiliations:
1 Dept. New Materials and Biosystems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497649            
Publ. Info: Boston : MRS
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: F7.3.1 - F7.3.6 Identifier: -

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Title: Materials Research Society Symposium Proceedings
Source Genre: Series
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Publ. Info: -
Pages: - Volume / Issue: 812 Sequence Number: - Start / End Page: - Identifier: -