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Title:
Thin Films—Stresses and Mechanical Properties XI
Source Genre:
Proceedings
Creator(s):
Buchheit, T.E., Editor
Minor, A. M., Editor
Spolenak, R.1, Editor
Takashima, K., Editor
Affiliations:
1
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655
Publ. Info:
Warrendale, Pa. : Materials Research Society
Pages:
-
Volume / Issue:
-
Sequence Number:
-
Start / End Page:
O5.2.2 - O5.2.6
Identifier:
-