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Title:
Thin Films—Stresses and Mechanical Properties XI
Source Genre:
Proceedings
Creator(s):
Buchheit, Editor
E., T., Editor
Minor, Editor
M., A., Editor
Spolenak, Editor
R., Editor
K., Takashima, Editor
Affiliations:
-
Publ. Info:
Warrendale, PA : MRS
Pages:
-
Volume / Issue:
-
Sequence Number:
-
Start / End Page:
O6.5.1 - O6.5.6
Identifier:
-