Characterization of nanolayers by sputter depth profiling

Hofmann, S.

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Characterization of nanolayers by sputter depth profiling

Hofmann, S. (2005). Characterization of nanolayers by sputter depth profiling. Applied Surface Science, 241, 113-121.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2744-2 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2745-F

Genre: Journal Article

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Creators:
Hofmann, S.¹, Author

Affiliations:
1Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644

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Free keywords: MPI für Metallforschung; Emeriti and Others;

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Language(s): eng - English

Dates: Date issued: 2005

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 218231

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Title: Applied Surface Science

Source Genre: Journal

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Pages: - Volume / Issue: 241 Sequence Number: - Start / End Page: 113 - 121 Identifier: -