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キーワード:
CLUSTERS FILM GROWTH ISLANDS X-RAY-SCATTERING
要旨:
Within a combinatorial investigation, a gradient sputtered gold layer on top of polystyrene on silicon substrate is addressed. Results from a real-space inspection by transmission electron microscopy are compared with surface-sensitive microbeam grazing incidence small-angle x-ray scattering. The combinatorial approach allows distinguishing different morphologies prepared under exactly the same environmental conditions on one single substrate. The transition of a coalescent layer to an isolated nanoparticle layer is determined as a function of sputter rate. Though optical spectra show only slight differences, the morphology and structure are distinctly different from evaporated layers prepared with same mass thickness. (c) 2006 American Institute of Physics
