非表示:
キーワード:
calibration, chemical vapour deposition, quartz crystal microbalances, scanning electron microscopy, thin film devices
要旨:
A portable quartz crystal micro balance for physical vapor deposition techniques is presented. The device is used for the calibration of evaporators employed in the preparation of thin film systems that are studied in surface science. The design is based upon a portable sample setup, highly versatile and customizable. It can be transported within an ultrahigh vacuum system, stored in a sample garage and be used in front of different evaporators. Details of the setup are described. Finally, the performance of the device is demonstrated and compared to scanning tunneling microscopy measurements.
