非表示:
キーワード:
-
要旨:
The final properties of sophisticated products can
be affected by many unapparent dependencies within the manufacturing
process, and the products integrity can often only be
checked in a final measurement. Troubleshooting can therefore
be very tedious if not impossible in large assembly lines.
In this paper we show that Feature Selection is an efficient tool for
serial-grouped lines to reveal causes for irregularities in product
attributes. We compare the performance of several methods for
Feature Selection on real-world problems in mass-production of
semiconductor devices.
Note to Practitioners We present a data based procedure
to localize flaws in large production lines: using the results of
final quality inspections and information about which machines
processed which batches, we are able to identify machines which
cause low yield.
