Modular deposition chamber for in situ X-ray experiments during RF and DC 
magnetron sputtering

Krause, B.; Darma, S.; Kaufholz, M.; Graefe, H. H.; Ulrich, S.; Mantilla, M.; Weigel, R.; Rembold, S.; Baumbach, T.

doi:10.1107/S0909049511052320

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Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering

Krause, B., Darma, S., Kaufholz, M., Graefe, H. H., Ulrich, S., Mantilla, M., et al. (2012). Modular deposition chamber for in situ X-ray experiments during RF and DC magnetron sputtering. Journal of Synchrotron Radiation, 19, 216-222. doi:10.1107/S0909049511052320.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-4AD7-2 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-4AD8-F

Genre: Journal Article

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Creators:
Krause, B.¹, Author
Darma, S.², Author
Kaufholz, M.², Author
Graefe, H. H.², Author
Ulrich, S.², Author
Mantilla, M.³, Author
Weigel, R.⁴, Author
Rembold, S.², Author
Baumbach, T.², Author

Affiliations:
1Dept. Metastable and Low-Dimensional Materials, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497645
2ANKA, Institut für Synchrotronstrahlung, Karlsruher Institut für Technologie, Karlsruhe, Germany, ou_persistent22
3Max Planck Society, ou_persistent13
4Former Central Scientific Facility ANKA Synchroton Beamline, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497651

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Free keywords: MPI für Intelligente Systeme; Abt. Dosch/Rühle;

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Language(s): eng - English

Dates: Date issued: 2012-03

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 609560
DOI: 10.1107/S0909049511052320

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Title: Journal of Synchrotron Radiation

Source Genre: Journal

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Pages: - Volume / Issue: 19 Sequence Number: - Start / End Page: 216 - 222 Identifier: -