Interconnects for Microelectronics

Spolenak, R.; Zschech, E.

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Interconnects for Microelectronics

Spolenak, R., & Zschech, E. (2003). Interconnects for Microelectronics. In K. Wetzig, & C. M. Schneider (Eds.), Metal Based Thin Films for Electronics (pp. 7-24). Weinheim: Wiley-VCH.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2E19-C Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2E1A-A

Genre: Book Chapter

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Creators:
Spolenak, R.¹, Author
Zschech, E., Author

Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655

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Free keywords: MPI für Metallforschung; Abt. Arzt;

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Language(s): eng - English

Dates: Date issued: 2003

Publication Status: Issued

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Identifiers: eDoc: 55978

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Title: Metal Based Thin Films for Electronics

Source Genre: Book

Creator(s):
Wetzig, K., Editor
Schneider, C. M., Editor

Affiliations:
-

Publ. Info: Weinheim : Wiley-VCH

Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 7 - 24 Identifier: -