Silicon on insulator nanoscale backside interconnects for atomic and molecular 
scale circuits

Lwin, M. H. T.; Tun, T. N.; Kim, H. H.; Kajen, R. S.; Chandrasekhar, N.; Joachim, C.

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Silicon on insulator nanoscale backside interconnects for atomic and molecular scale circuits

Lwin, M. H. T., Tun, T. N., Kim, H. H., Kajen, R. S., Chandrasekhar, N., & Joachim, C. (2010). Silicon on insulator nanoscale backside interconnects for atomic and molecular scale circuits. Journal of Vacuum Science & Technology B, 28(5), 978-984.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-000F-7387-0 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0023-C4CC-1

Genre: Journal Article

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Creators:
Lwin, M. H. T., Author
Tun, T. N.¹, Author
Kim, H. H., Author
Kajen, R. S., Author
Chandrasekhar, N., Author
Joachim, C., Author

Affiliations:
1MPI for Polymer Research, Max Planck Society, ou_1309545

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Language(s): eng - English

Dates: Date issued: 2010

Publication Status: Issued

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Identifiers: eDoc: 504948
Other: P-10-319

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Title: Journal of Vacuum Science & Technology B

Alternative Title : J. Vac. Sci. Technol. B

Source Genre: Journal

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Pages: - Volume / Issue: 28 (5) Sequence Number: - Start / End Page: 978 - 984 Identifier: -