Room temperature silicon wafer bonding with ultra-thin polymer films

Kräuter, G.; Schumacher, A.; Gösele, U.; Jaworek, T.; Wegner, Gerhard

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Room temperature silicon wafer bonding with ultra-thin polymer films

Kräuter, G., Schumacher, A., Gösele, U., Jaworek, T., & Wegner, G. (1997). Room temperature silicon wafer bonding with ultra-thin polymer films. Advanced Materials, 9(5), 417-420.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-000F-58D2-D Version Permalink: https://hdl.handle.net/11858/00-001M-0000-000F-58D3-B

Genre: Journal Article

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Creators:
Kräuter, G., Author
Schumacher, A., Author
Gösele, U., Author
Jaworek, T.¹, Author
Wegner, Gerhard¹, Author

Affiliations:
1MPI for Polymer Research, Max Planck Society, ou_1309545

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Language(s): eng - English

Dates: Date issued: 1997

Publication Status: Issued

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Identifiers: eDoc: 372558

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Title: Advanced Materials

Alternative Title : Adv. Mater.

Source Genre: Journal

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Pages: - Volume / Issue: 9 (5) Sequence Number: - Start / End Page: 417 - 420 Identifier: -